視野62*62mm,量程±6.5mm;重復(fù)精度1μm
查看詳情線長2.3mm,量程1.4mm,Z軸重復(fù)性0.1μm
查看詳情線長10mm,量程6mm,X方向分辨率4.9μm
查看詳情線長5.9mm,量程3mm,Z軸重復(fù)性0.1μm
查看詳情線長5.9mm,量程2.4mm,Z軸重復(fù)性0.2μm
查看詳情線長13mm,量程6mm,Z軸重復(fù)性0.15μm
查看詳情線長4.3mm,量程0.7mm,Z軸重復(fù)性0.04μm
查看詳情電源19V≥3A,功率55w,光耦隔離
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